Key High Vacuum Products Piezoelectric Gas Flow Valves control gas flows within a vacuum system. The PEV-1 is compact, responds in milliseconds, and delivers extremely accurate gas flows for PID pressure control applications.
Key High’s PEV-1 requires a 0-100 VDC input. The valve's threshold voltage is 20-30vdc, with a maximum voltage not exceeding 100vdc. The maximum inlet pressure should not exceed 50psig.
The PEV-1 is a fail-safe (close) valve. In the event of a power loss, the PEV-1 will remain closed until power is restored.
All valves manufactured by Key High are leak tested using a helium mass spectrometer at 3 x 10-9 sccs, with a one-atmosphere differential and exhibit no measurable leak.