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ECV-40


Exhaust Check Valves

Key High's ECV series valves are exhaust "Check Valves.” Our ECV series valves allow gas to flow in only one direction, thereby preventing backstreaming and particle migration into the process chamber. The ECV series valves do not require utilities and operate simply using the roughing pump’s exhaust flow.

Mounting

The ECV “Check Valve” is a directional, one-way valve that must be mounted vertically on the backing pump's exhaust port.

Features & Benefits
  • Blocks pumping fluids from migrating into the vacuum chamber
  • Inline, Compact design
  • NW 40 flange interface
  • Bakeable to 100° C
  • Leak rate < 5 x 10-9 sccs
Construction
  • 316 stainless steel enclosure
  • Viton® seals

 

 

Pneumatic Bellow Assemblies

Pneumatic Bellow Assemblies

Pneumatic Bellow Assemblies

 
PART NUMBER PORT STYLE LENGTH
ECV-40 NW 40 3.15
 

Materials of Construction

  • Body = 316 stainless steel
  • Viton® Bonnet Seal
  • Poppet “Check Ball” is Viton®

Mounting

The ECV “Check” valve must be installed vertical orientation on the exhaust port of the backing pump, as the ECV “Check” valves are designed for directional flow.


Product information is subject to change without notice. Product images may include options or accessories not included with the base model.

Key High Vacuum Products, Inc.
Key High
36 Southern Boulevard 11767 Nesconset, NY
1-631-360-3970
sales@keyhigh.com
1-631-360--3970

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