SPV valves are two-stage valves. First, the BYPASS Valve is opened, slowly starting the pump down cycle. Once the chamber reaches a specified vacuum pressure, the parent valve is opened, allowing full pumping speed. SPV valves feature a removable orifice, allowing users more control over the pump down cycle.
Key High’s SPV valves are designed to control the pump down cycle for sensitive applications. When combined with our DF SERIES DIFFUSERS for venting, turbulence and particulate issues with substrates are virtually eliminated.
Our SPV series valves have been successfully installed in many applications, including the semiconductor and optical industries. They allow precision control over the roughing process.
| PART NUMBER | TUBE OD | PORT STYLE | A | B | C | D | E | F |
|---|---|---|---|---|---|---|---|---|
| SPV-100-N | 1” | Tube End | 7.05 | 2.12 | 2.12 | 2.00 | 5.06 | 3.65 |
| SPV-100-K-N | 1” | NW-25 | 7.17 | 2.25 | 2.25 | 2.00 | 5.75 | 3.65 |
| SPV-100-N-MS | 1” | 2-1/8” OD MET-SEAL | 7.22 | 2.42 | 2.42 | 2.00 | 5.22 | 3.65 |
| SPV-150-N | 1-1/2” | Tube End | 8.03 | 2.25 | 2.25 | 2.75 | 5.46 | 3.90 |
| SPV-150-K-N | 1-1/2” | NW-40 | 8.16 | 2.46 | 2.46 | 2.75 | 7.41 | 3.90 |
| SPV-150-N-MS | 1-1/2” | 2-3/4” OD MET-SEAL | 8.24 | 2.46 | 2.46 | 2.75 | 7.41 | 3.90 |
| SPV-200-N | 2” | Tube End | 10.77 | 3.25 | 3.25 | 3.50 | 7.40 | 4.12 |
| SPV-200-K-N | 2” | NW-50 | 10.93 | 3.50 | 3.50 | 3.50 | 7.55 | 4.12 |
| SPV-200-N-MS | 2” | 3-3/8” OD Tube End | 10.99 | 3.47 | 3.47 | 3.50 | 7.62 | 4.12 |
| SPV-250-N | 2-1/2” | Tube End | 10.88 | 3.25 | 3.25 | 4.00 | 7.87 | 4.40 |
| SPV-250-K-N | 2-1/2” | NW-63 Clamp Style | 11.68 | 3.50 | 3.50 | 4.00 | 8.62 | 4.40 |
| SPV-250-N-MS | 2-1/2” | 4-1/2” OD MET-SEAL | 11.26 | 3.47 | 3.47 | 4.00 | 8.25 | 4.40 |
| SPV-300-N | 3” | Tube End | 11.87 | 3.50 | 3.50 | 4.50 | 8.37 | 4.65 |
| SPV-300-K-N | 3” | NW-80 Clamp Style | 12.58 | 3.75 | 3.75 | 4.50 | 9.75 | 4.65 |
| SPV-300-N-MS | 3” | 4-5/8” OD MET-SEAL | 12.16 | 3.78 | 3.78 | 4.50 | 8.65 | 4.65 |
| SPV-400-N | 4” | Tube End | 13.69 | 4.25 | 4.25 | 6.00 | 9.45 | 5.40 |
| SPV-400-K-N | 4” | NW-100 Clamp Style | 13.94 | 4.50 | 4.50 | 6.00 | 9.71 | 5.40 |
| SPV-400-N-MS | 4” | 6” OD MET-SEAL | 14.07 | 4.69 | 4.69 | 6.00 | 9.89 | 5.40 |
Add option code to suffix of part number.
| DESCRIPTION | OPTION CODE |
|---|---|
| 24 Volt DC Solenoid | -1 |
| 24 Volt AC Solenoid | -2 |
| 240 Volt AC Solenoid | -3 |
