In an ETCH/CVD environment one of the major areas of concern is the solidification of process gases that cool as they exit from the heated process chamber to the cooler temperatures found downstream. These gases then sublimate on the surfaces of the foreline. Result; solidification of hazardous byproducts in the line causing a loss in conductance, particle migration issues and fouling of the valve seals. By using Key High Heater Blankets, significant enhancements have been proven in reducing or eliminating these vital concerns. By incorporating Heater Blankets to heat the foreline to an elevated temperature of 100°C, assures the gases will not condense and solidify on their way to the scrubber. Clean up your downstream concerns with Heater Blankets from Key High.
All Key High Heater Blankets feature a standard internal thermostat to control the high temperature set point, eliminating high temperature run away. Many Heater Blankets feature a visual red light alerting personnel of proper operation of the blanket. All Heater Blankets have two Hubbell twist plugs (one male, one female) for easy daisy chain installation. The typical ramp up cycle of a Heater Blanket to the thermal set point, is less than 30 minutes from a cold start. Most Heater Blankets combine ceramic snap action thermostat and fuse to control the high set point and all blankets are manufactured from UL recognized materials and are cleanroom compliant (silicone foam insulation of the blanket and kevlar laces.) All blankets are installed to conserve on radiant heat loss and control excessive particle contamination with a snug intimate fit. The external temperature of the blanket is approximately 75°C and personnel should exercise proper precaution accordingly. Key High's power cables are specifically designed and engineered for the Heater Blankets. All power cables are grounded and fused for safety and must be purchased separately.
These silicone rubber heaters are designed and engineered to be simple to use, rugged in construction and are economical. By applying a uniform thermal load to down stream forelines, improves the consistence of process yields as well as adding predictability to the preventive maintenance cycle. By using Key High Heater Blankets results in faster pump down cycles, less water vapor, reduction of particles, elimination of solid buildup, combining to increase machine uptime and thruput of product.
Always position valves as close as feasible to the process chamber. Attach if possible. This reduces the chance of particle buildup upstream of the valve, which will migrate into the valve enclosure adversely affecting the performance of the valve. Always install valves in front of traps, as traps by their inherent nature will cool the gas stream generating particles which may condense on the valve surface. Upon request Heater Blankets are available in a wide variety of shapes, sizes and voltages, which can be designed, engineered and fabricated per customer request. Consult factory for details.
